Some of My Spin-Coating Related Experience
Published work topic | Major finding of work |
Multilayer Interference Filter Depositions | Tightly controlled sol-gel multilayers can be deposited to make optical interference filters |
Tests of Chuck Mark Formation Mechanism | Evaporative Cooling can Impose Local Thermal Differences that Influence Final Coating thickness. |
Quantification of Evaporative Cooling Effects | Evaporative Cooling is Verified using InfraRed video of solvent spinning on wafer surfaces. |
Interferometry to Monitor Spin Coating (Pure Solutions) | Technique is presented for analyzing interferograms to determine solvent evaporation rate and fluid flow rate |
Interferometry to Monitor Spin Coating (Mixed Solutions) | Above technique is extended to mixtures. |
Evaporative Cooling and Thermocapillary Convection | Evaporative Cooling effects not strong enough to drive thermocapillary convection. |
Potential for Surface Skin Formation | Evaporation Rate was too small to cause large concentration gradients until very late in process |
Striation Spacing depends on Spin Speed | Characteristic spacing is maintained over an entire wafer – suggesting local effect rather than out-flow effect. |
Laser Diffraction to Measure Striation Spacing | Laser diffraction at oblique angle can be used to characterize average striation spacing. |
When do Striations Form During Spinning? | Striation defects form only very near the end of spinning – during a time which might be mainly characterized by “drying”. |
Color Video Observation of Fluid Thickness Profiles During Spinning | Color Video is a good method for mapping the fluid thickness changes that occur near the end of spin coating. |
Dunbar
P. Birnie, III
Professor
Department of Materials Science and Engineering
Rutgers, The State University of New Jersey
607 Taylor Rd.
Piscataway, New Jersey, 08854-8065
Major revisions installed in December 2004
Based on earlier version from July 2000
Updated in February 2005.
Page started 1 May 1998
(c) 1998,1999,2000,2004,2005 D. P. Birnie, III