While I've attempted to provide as much information as possible here at my spin-coating web site, there are other resources out there that can also be useful. If you find other information that I should link up then please send me an e-mail directing me there.

A trade journal called "The Journal of Advanced Applications in Contamination Control" has an on-line article in their archives about using computational fluid dynamics to improve a spin coater design. The article is entitled "Limit Equipment Design Costs with Fluid Flow Simulation." Click HERE to load that article. Click on the logo to visit the A²C² home page.

A company called "Cape Simulations" offers a wide variety of finite-element modeling simulation tools "tailor-made to the client's specific system and requirements." One of their advertised products is a spin-coating simulator. Click HERE to load the specifications of that simulation tool. Click on the logo to visit the Cape Simulations home page.
 
 

The trade organization called "Radtech" provides a spin-coating primer at their web site. Their nonprofit organization is dedicated to "the technical, educational and market advancement of Ultraviolet (UV) and Electron Beam (EB) Technology." Their spin-coating primer is actually quite nice covering many basics about dispense, spin speed profiles, etc. Click HERE to load their spin-coating applications guide. Click on the logo to visit the Radtech home page.

A new marketing site has recently appeared related to Sol-Gel Coatings. They hope to  become the central place where Chemists, Physists, Materials Scientists and device Technologists, together with Industrial engineers can exchange and gather information on Sol-Gel related areas. Click on the logo to visit the Sol-Gel gateway home page.

Sandia National Labs has also performed spin-coating modeling using CFD techniques using their state-of-the-art GOMA code. A beautiful example of a spin-coating fluid profile can be found by selecting the "Gallery" button at the GOMA home page - and then picking the "spin coating with remeshing" choice. Click HERE. Click on the logo to reach the SNL home page.

And these important organizations are interested in coatings for microelectronic applications:

International SEMATECH is a unique endeavor of 13  semiconductor manufacturing companies from seven countries. Located in Austin, Texas, USA, the consortium strives to be the  most effective, global consortium influencing semiconductor manufacturing technology. Click HERE to visit their home page. Click HERE to get a list of the member companies.

Semiconductor Equipment and Materials International (SEMI) is a global trade association that represents the semiconductor and flat panel display equipment and materials industries. Click HERE to visit their home page. Click HERE to get a list of the member companies.

Dunbar P. Birnie, III
Professor
Department of Materials Science and Engineering
Rutgers, The State University of New Jersey   
607 Taylor Rd.
Piscataway, New Jersey, 08854-8065

Major revisions installed in December 2004

Based on earlier version from July 2000
Updated in February 2005.
Page started 1 May 1998
(c) 1998,1999,2000,2004,2005  D. P. Birnie, III